发明名称 WIRE BONDING
摘要 PURPOSE:To stabilize a wire loop and to prevent a short circuit at an edge and a bend by moving a capillary in such a way that the tension is exerted on the wire loop just before a bonding point. CONSTITUTION:After a capillary 4 has bonded a wire 2 to a first bonding point a, it is lifted, passes through a highest rise point b and then descends; the capillary 4 stops descending once at a prior point c and is shifted horizontally to an upper point d; after that, it descends again and bonds the wire 2 to a second bonding point e. If the capillary 4 is shifted according to this locus, the tension is exerted on a wire loop 7; a curved point on the side of the capillary 4 is shifted from A to B; accordingly, it is possible to prevent a short circuit at an edge irrespective of a bonding distance and a type of a semiconductor device.
申请公布号 JPS63257237(A) 申请公布日期 1988.10.25
申请号 JP19870092717 申请日期 1987.04.14
申请人 MITSUBISHI ELECTRIC CORP 发明人 OKAMURA MASAMITSU;ICHIMURA HIDEO;OSHIGE TOYOMI
分类号 H01L21/60 主分类号 H01L21/60
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