| 摘要 |
PURPOSE:To facilitate the fine movement of the title apparatus by switching- over prescribed driving signals, analog signals capable of suitably controlling an interval between piezoelectric elements, and ordinary signals from one to another, and giving them to said apparatus. CONSTITUTION:An inching type moving mechanism is composed of a first and second piezoelectric elements 1-2, a third piezoelectric element 3 joined between said both elements 1-2 and expanding and contracting in the manner of changing an interval between the two piezoelectric elements, a movable rod 4, driving amplifiers 5-7, an input changeover switch 8 for switching-over driving signals, and a controller 9. Said controller 9 receives a stop signal, a forward and reverse change-over designation signal and a speed command signal to give signals necessary for the amplifiers 5-6 for said first and second elements and for the input changeover switch 8, respectively. Thus, said mechanism is caused to move by an inching motion and, after it has entered the range where a fine movement is necessary, one piezoelectric element 5(6) holds the movable rod 4, adjusts the expansion and contraction of the third piezoelectric element 3 and controls the movement of said movable rod 4. |
