| 摘要 |
PURPOSE:To make it sure to obtain the necessary adsorbing strength using the adsorption plate other than the prescribed one by a method wherein a throttle valve is provided on an outlet piping led out from the adsorbing hole of each adsorption plate, and even when air flows in from the adsorbing hole of the prescribed adsorption plate, the lowering of the vacuum degree of the entire device can be suppressed. CONSTITUTION:A plurality of adsorption plates 3 and 4 which adsorb the material to be adsorbed, outlet pipings 8 and 9 led out from the adsorbing holes 3a and 4a provided on the adsorption plates 3 and 4 and also led out from the adsorption holes 3a and 4a of the adsorption plates 3 and 4, and the source of vacuum to be connected to outlet pipings 8 and 9 through the intermediary of a main piping 10, are provided. Throttle valves 13 and 14 are provided on the outlet pipings 8 and 9 in the vacuum adsorbing device mentioned above. As a result, even when air flows in by any chance from the adsorbing hole of the prescriber adsorbing plate, the lowering of the degree of vacuum state of the entire device can be suppressed, and the irreducible minimum adsorbing strength can be secured on the other adsorption plate. Also, as it is sufficient to only add the throttle valves to the outlet piping, the constitution of the title vacuum adsorbing device is simple, it can be manufactured at low cost, and the device can be applied easily to existing devices. |
