| 摘要 |
PURPOSE:To secure a sufficient film thickness and to improve the accuracy of a track width by combining a first film forming process to form a soft magnetic thin metallic film on a substrate, a process to form a groove to specify a track width and a second film forming process to adhere the soft magnetic thin metallic film and make it into a final film thickness. CONSTITUTION:In the first film forming process, a soft magnetic thin metallic film 3 is adhered and formed only for the film thickness on the value larger than the value to subtract a maximum film thickness tmax from a desired final film thickness Tf by alpha only in a substrate 1. Next, a grooving processing 4 to specify a track width TW is executed onto the substrate 1, continuously, in the second film forming process, a remaining film thickness 6 necessary to achieve the desired final film thickness Tf is adhered, and the correct control of the track width TW can be executed. Thus the desired magnetic characteristic can be satisfied and a dimension accuracy can be improved. |
