| 摘要 |
PURPOSE:To satisfy durability and magnetic characteristics and to permit formation of a magnetic recording medium at a high speed by introducing gaseous oxygen and gaseous monomer simultaneously into a vessel and executing a glow discharge treatment after vapor deposition at the time of forming a thin ferromagnetic metallic film by diagonal vapor deposition. CONSTITUTION:For example, a cylindrical can is used and an electron beam evaporation source 14 is disposed right under the can so that vapor deposition can be executed. A glow treatment electrode 17 is so constituted that an electric field is applied to said electrode. A gas introducing port 16 is disposed in the position near the min. incident angle. The gaseous oxygen and the gaseous monomer are simultaneously introduced into the chamber and the glow discharge treatment is executed after the vapor deposition at the time of forming the thin ferromagnetic metallic film by a diagonal vapor deposition method on a high-polymer film 11 moving along a rotary support 10. The magnetical sepn. between columnar particles is, therefore, improved and the polymerized layer of the gaseous monomer is formed integrally with the columnar particles. The magnetic recording medium well balanced in C/N, magnetic characteristics and durability is thereby formed at a high speed.
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