| 摘要 |
PURPOSE:To prevent a superconductive thin film from being deteriorated by forming a barrier layer on a substrate so that it is made of a stable material which does not react to any ingredients, contained in a substrate and a superconductive material, at normal temperature to at heat treatment temperature and next by forming a thin film of a superconductive material on the barrier layer and next by performing heat treatment. CONSTITUTION:A target T1 made of Pt or the like, and a target T2 made of a superconductive material, which is formed by blending Y, Ba, Cu, O in respective prescribed compositions, are provided. When high-frequency magnetron sputtering is performed on the target T1, a barrier layer 3 made of Pt is formed on a substrate 1 on a room temperature state. When sputtering is also performed on the target T2 in succession, a thin film 2 made of a superconductive material of a Y-Ba-Cu-O group is formed on the barrier layer 3, so that a laminate 4 is obtained to be composed of the substrate 1, the Pt barrier layer 3, and the superconductive material thin film 2. The thin film 2 of each laminate 4 is provided with heat treatment in the atmosphere, and the thin film 2 on an amorphous state is crystallized to be formed into a superconductor. The thin film 2 of the superconductive material can be hence prevented from being deteriorated.
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