| 摘要 |
PURPOSE:To improve a laser-beam output and efficiency by forming a heat- insulating material insulating the heat of a discharge tube by ceramic fiber while increasing the density of the heat-insulating material on an inner circumferential section and reducing it on an outer circumferential section. CONSTITUTION:When pulse voltage is applied to an anode 5 and a cathode 6 for a laser oscillating tube from a driving power 7, pulse discharge is generated between the electrodes, and copper particles 4 on the inside are heated and vaporized. The copper vapor is excited and emits light by discharge plasma. The heat of a discharge tube 3 is insulated by a heat-insulating material 21, and a heat-insulating chamber 14 housing the heat-insulating material is evacuated by means of a vacuum pump 16. The inner layer 21A of the heat-insulating material 21 adjacent to the discharge tube 3 has the high density of the heat- insulating material, and the content of a buffer gas from a buffer-gas feeder is reduced, thus concentrating discharge energy into the discharge tube 3. |
