摘要 |
PURPOSE:To reduce the vibration component vertical to detection plate and to suppress offset to a low level, by arranging a detection plate on the fixing end side of vibration and suppressing the vibration excited in the detection plate by an exciting plate to a low level. CONSTITUTION:One ends of detection plates 1a, 1b are fixed to the fixing surface 5a of a base stand 5 and exciting plates 3a, 3b are arranged at positions capable of largely vibrating in + or -alpha directions at the upper parts thereof and, therefore, the vibrations in the + or -theta directions are not largely generated in the detection plates 1a, 1b. As a result, the component in a direction of the vibration of the detection plate 1a or 1b generated in such a state that the detection plate 1a and the exciting plate 3a or the detection plate 1b and the exciting plate 3b do not perfectly cross each other is reduced and offset can be suppressed to a low level. |