| 摘要 |
<p>A vacuum apparatus comprising a substrate setting disc 1 which is arranged in a conveyance chamber and on which substrates are placed, a drive system 34, 19, 21 which drives and rotates the disc 1, a cam 2 which is fixed to the disc 1, switching means 14a - 14d to switch signal circuits through the cam 2, calculation means 37, 43 to receive digital signals generated by the switching operations of the switching means 14a - 14d, signals from the drive system 34, 19, 21 and signals from respective processing devices so as to execute calculations, a memory 42 which registers calculated results, and a display unit 45 which displays the registered contents on a screen, rotational positions of the disc 1 being loaded so as to control the hysteretic aspects of the individual substrates within the conveyance chamber with the substrates at the respective positions and addresses held in correspondence.</p> |
