| 摘要 |
PURPOSE:To retain a remaining region as superconducting ceramics by forming a superconducting ceramic material on a substrate, selectively irradiating a laser light or a strong light equivalent to the laser light to remove by subliming or flying the ceramic material. CONSTITUTION:Ceramics 2 are formed by a sputtering method or a printing method on a substrate 1, and heat treated in an oxidative atmosphere to form a superconducting ceramic film 2. Further, a laser 4 is irradiated to perform a laser scribing, thereby forming a groove 3. In this case, when a next rectangular beam is so irradiated as to be superposed by 80-98% on one rectangular spot in order to scan the pulse on a stripe, only the part to which the light 4 is irradiated is selectively removed by subliming the ceramics 2. Thus, the superconductor 2 can be selectively retained substantially in a coil or other shape on the substrate 1. |
