| 摘要 |
PURPOSE:To suppress outflow of processing liquid, by a method wherein an annular resilient material, being smaller than a groove, formed in the outer periphery of the injection port of a processing liquid injection nozzle, and formed in an oblong in cross section, is situated in the groove. CONSTITUTION:An annular resilient material 16 situated in a groove 15 formed in the outer periphery of a nozzle injection port is forcibly spread by means of the pressure of a component flowing out along the surface of a workpiece 12 when processing liquid 10 is injected through a nozzle port, and even the outer periphery of the inner wall of the groove 15 is deformed. Approximately simultaneously, the upper surface thereof is pressurized by means of the processing liquid flowing around a position above the annular resilient material 16, and the annular resilient material 16 is pressed against the surface of the workpiece 12. This constiitution presses the annular resilient material 16 against the surface of the workpiece 12 through utilization of the liquid pressure of the processing liquid being about to flow out along the surface of the workpiece 12, and suppresses outflow of the processing liquid.
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