MANUFACTURE OF ELEMENT FOR ACTIVE MATRIX OF DISPLAY DEVICE

摘要

PURPOSE:To prevent the optical deterioration of a semiconductor layer and to improve the reliability of the layer, by forming transparent conductive layers constituting a lead layer for picture element electrode and scanning electrode layer and a metallic layer put on the transparent conductive layers of a substrate. CONSTITUTION:A scanning electrode layer 11 and lead layer 12 for picture element electrode are formed on a laser substrate 42, with the layers 11 and 12 being separated from each other. The scanning electrode layer 11 is a laminated body composed of the upper layer of a metallic layer 11a and lower layer of a transparent conductive layer 11b. The lead layer 12 is another laminated body composed of the upper layer of a metallic layer 12a and lower layer of a transparent conductive layer 12b. A semiconductor layer 21 and a 2nd electrode layer 30 are piled up above the scanning electrode layer 11 and lead layer 12 for picture element electrode. Light advancing from the substrate side 42 is intercepted by the metallic layers 11a and 12a. Therefore, occurrence of defective switching caused by the optical deterioration of the semiconductor layer 21 can be prevented.