PHOTO RESPONSIVE DEVICE PROCESSING METHOD

摘要

A hydrogenated amorphous silicone photoconductive membrane was made by radio frequency glow discharge using silane gas (SiH4). Thus, indume tin oxide layer transparent-electrode (2) was formed by deposition on slide glass substrate (1) followed by radio frequency discharging with 5-40 W output between both electrodes at 50 m Torr of discharge pressure under 3-4% of silane gas to form thin hydrogen- containing amorphous silicone membrane (3).