| 摘要 |
PURPOSE:To shorten an operation time by providing an illumination holder which holds a light source such as a lamp movably. CONSTITUTION:The rear end part of the illumination holder 21 is fitted rotatably to a lever 13. Then when inspection is carried out, a lock piece 23-c is put in a metal fitting 23-a and the holder 21 is rotated downward. Consequently, the lamp 22 illuminates semiconductor devices 2-4 placed at three inspection positions at the same time and cameras 18-20 photograph the devices 2-4. On the other hand, the holder 21 is rotated upward from this side at the time of repair, the lock piece 23-c of a locking means 23 is drawn out laterally, and the lower part of one arm of the holder 21 is supported. Consequently, the holder 21 is locked. There is therefore a sufficient space is left at the periphery of the inspection positions, and the periphery of a conveyance rail 1 or the periphery of the cameras 18-20 is easily repaired and adjusted, so that the operation time is shortened. |
