发明名称 A FIELD-EFFECT SEMICONDUCTOR DEVICE
摘要 A field-effect semiconductor device comprises a via-hole electrode (6a) formed so as to penetrate from the top to the back of the semiconductor substrate (1), a dielectric film (10) formed on the semiconductor substrate so as to be opposite to the via-hole electrode, and an electrode (26), forming a via-hole type of passive element, such as a capacitor, so as to improve the integration degree.
申请公布号 DE3377960(D1) 申请公布日期 1988.10.13
申请号 DE19833377960 申请日期 1983.06.29
申请人 FUJITSU LIMITED 发明人 YAMAMURA, SHIGEYUKI;TAKEUCHI, YUKIHIRO
分类号 H01L21/768;H01L23/48;H01L23/64;H01L27/06;(IPC1-7):H01L27/06 主分类号 H01L21/768
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