| 摘要 |
PURPOSE:To obtain a uniform superconductive thin film easily by simultaneously heating and vaporizing compounds containing elements or group IIIa, IIa, and Ib in the periodic table, and depositing them on a substrate heated to a specified temperature in an oxygen-rich environment. CONSTITUTION:Compounds of group IIIa, IIa, Ib are arranged in pots 3, respectively. They are then heated and vaporized at several 100 deg. to 2500 deg.C with the heat of electron beams or the like, and vaporized while the temperature in a growth chamber 1 is maintained at e.g. about 10<-10> to 10<-11> Torr. A ceramic plate of Al2O3 or the like is arranged as a substrate S, and then oxigen is sprayed from a nozzle 6 while the board is heated at e.g. 900 deg. to 1100 deg.C by a heater 4. In this way, vaporized materials A, B, C are deposited on the substrate S to form ceramic materials combining with oxygen, and a uniformly structured thin film is thereby obtained.
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