发明名称 |
Foreign substance inspecting system including a calibration standard |
摘要 |
A system for placing thereron an object to be inspected, scanning the surface of the object to be inspected by a light spot and inspecting a foreign substance on the basis of light information produced by the foreign substance on the surface of the object to be inspected includes light information producing means including a member for producing light information substantially similar to the light information produced by the foreign substance, and means for disposing the member on a surface substantially identical to the surface of the object to be inspected placed on the system.
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申请公布号 |
US4776693(A) |
申请公布日期 |
1988.10.11 |
申请号 |
US19870120231 |
申请日期 |
1987.11.12 |
申请人 |
NIPPON KOGAKU K. K. |
发明人 |
IMAMURA, KAZUNORI;TANIMOTO, AKIKAZU;KAKIZAKI, YUKIO |
分类号 |
G01N21/94;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/94 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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