INSTRUMENT FOR MEASURING THERMAL PROPERTY OF THIN FILM-LIKE MATERIAL

摘要

PURPOSE:To permit exact measurement and evaluation of the thermal diffusivity of a thin film by providing a sample holder, heat source part and temp. measuring part. CONSTITUTION:A band-shaped thin film sample 1 is horizontally held by the sample holder 16 in such a manner that the center thereof does not lower. A laser light source which is the heat source is provided atop the sample 1 and the laser light 14 thereof is condensed by a slit 15 and is so adjusted that the linear laser light is projected to the sample 1 across the same. An optical system 18 for temp. measurement is then so adjusted that the radiation released from the very small part of the sample 1 is imaged to a detector 17. The inside of a chamber in which these measuring systems are fully housed is then evacuated by using an evacuation device. Impulsive light is released when the entire system attains a constant temp. The temp. measurement is started in synchronization therewith. The thermal diffusivity is determined from the measured temp. distribution, by which the exact measurement and evaluation thereof are permitted.