Vaporized material source,申请号US19640387410-传众专利搜索

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发明名称	Vaporized material source
摘要
申请公布号	US3313474(A)	申请公布日期	1967.04.11
申请号	US19640387410	申请日期	1964.08.04
申请人	CONSOLIDATED VACUUM CORPORATION	发明人	HAMILTON ALLEN R.
分类号	C23C14/24;H01J41/16	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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