发明名称 APPARATUS FOR MEASURING SPECTRAL CHARACTERISTIC OF DICHROIC MIRROR
摘要 PURPOSE:To measure the spectral characteristic of a dichroic mirror by a spectroscope, by using a vacuum container equipped with a mechanism for holding the dichroic mirror in vacuum and optical glass supported so as to form a Brewster angle with respect to the optical axis of the surface of the dichroic mirror. CONSTITUTION:The dichroic mirror 2 of a vacuum container 1 is sealed to a vacuum substrate in an airtight manner by low m.p. glass 6. A quartz glass surface plate 7 is sealed to the vacuum substrate 5 in an airtight manner by the low m.p. glass 6 so as to form a Brewster angle with respect to the optical axis of the dichroic mirror 2 and the vacuum container 1 is evacuated through a discharge pipe 8. By using this small-sized vacuum container 1, since a specimen to be measured can be held in the vacuum container at every individual specimen to be measured, it is unnecessary to newly perform vacuum evacuation by breaking a vacuum state at every measurement and, only by arranging the vacuum container to a commercial spectroscope, the spectral characteristic of the dichroic mirror used in a vacuum atmosphere can be measured.
申请公布号 JPS63238434(A) 申请公布日期 1988.10.04
申请号 JP19870073208 申请日期 1987.03.26
申请人 NEC CORP 发明人 AKIYAMA YASUHIRO;YAMADA KEIJI
分类号 G01J3/02;G01M11/02;G02B27/14 主分类号 G01J3/02
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