| 摘要 |
PURPOSE:To quickly and quantitatively analyze the dispersion state of the components in a composite material by projecting an electron beam to the random points in the analysis region, measuring the concn. of component elements, and determining the autocorrelation function of the concn. between the measurement points as a function of distance. CONSTITUTION:The electron beam 2 generated from an electron gun 2 of a scanning type electron microscope 1 is projected to a sample 5. The characteristic X-ray generated from the sample 5 is detected by an X-ray detector 10 and the element concn. at the point irradiated with the electron beam is detected by a microanalyzer 12. A central control part 13 drives motors 7, 8 in accordance with the random numbers of a random number generating circuit 14 to move sample tables 6a, 6b, thereby projecting the electron beam to the random points in the sample 5. The control part determines the autocorrelation function of the concn. between the respective measurement points as the function of the distance between the measurement points after making concn. analysis with a prescribed number of points and defines the distance r at which the autocorrelation function R is zero as a scale S of the separation. Since this S is determined with a fewer number of the measurement points, the shorter measurement time and computation time are necessitated. |
