| 摘要 |
PURPOSE:To improve the reliability of a scan type tunnel microscope by clipping the tip of a probe in the projection area of the cleavage surface of a sample by the tip of a driving mechanism which can be driven in the vertical direction of the probe. CONSTITUTION:A worm 9 is rotated after the sample is cleaved to turn a sample base 16, whose reverse surface is made abut on the tip of a knife edge 3. When the projection quantity of the cleaved surface of the sample 18 from a sample holding part is larger than a specific value, the cleaved surface strikes on the tip of a probe protection stylus 22. Consequently, the sample 18 is moved back by the sample holding part and the projection quantity is adjusted to a proper constant value. When the projection quantity is smaller than the specific value and no specific tunnel current flows even by putting the cleaved surface of the base 16 close to a cleaving operation position through the elastic deformation of the base 16, the base 16 is turned again to the cleaving operation position and the sample 18 is pushed out by a sample transporting mechanism to increase the projection quantity of the cleaved surface. Similarly, the projection quantity of the cleaved surface of the sample 18 is adjusted to a proper constant value. Consequently, the reliability is improved.
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