| 摘要 |
PURPOSE:To improve polishing efficiency, by a method wherein a polishing tool and a workpiece are situated in a polishing liquid tank with a given distance therebetween, a machining groove to polish by exerting an impact in an outbound and an inbound passage is formed in the tip of the tool. CONSTITUTION:A workpiece 1 is rotatably situated in a liquid tank 6 in which polishing liquid 5 is contained, and a polishing tool 2 to which ultrasonic wave vibration is propagated is rotatably situated on a surface to be machined with a given distance therebetween. A plurality of triangular wave patterned grooves are formed from the center to an outer periphery in the tip surface of the polishing tool 2. Thus, through rotational movement around an axis O2 of a workpiece 1 and rotational movement and vibration around an axis O1 of the mounting tool 2, by means of a triangular wave patterned groove, grinding particle in polishing liquid is activated to promote a polishing work. Movement of the polishing tool from the center of the workpiece 1 to the outer size thereof causes finishing of the workpiece with high precision.
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