| 摘要 |
PURPOSE:To manufacture a polishing tool to be used in polishing fluid in an accurate manner, by fixing a spherically machined porous core in an abrasive layer molding die, injecting an abrasive coating material in the cavity, and penetrating it into the porous inside, then forming it into the polishing tool. CONSTITUTION:A porous aluminum material 10a is fitted in the tip of a turning shaft 8, fixed by screw fastening or the like, and it is machined, thereby forming a porous aluminum spherical body 10. Next, this porous aluminum spherical body 10 is set in paired dies 14A and 14B, and hydrophilic polymer gel is injected into the cavity from an inlet, penetrating it into the porousness, thereby forming a polymer gel layer 12 the sphere surface. And, this polishing tool and a workpiece 6 are set up in polishing fluid 4 containing abrasive grains, and when the polymer gel layer 12 is approached to the workpiece 6 while rotating the turning shaft 8, the ambient polishing fluid 4 is dragged round owing to the hydrophilic property, thus polishing is carried out by the dynamic pressure. Thus, the polishing tool to be used in the polishing fluid is manufacturable in an accurate manner. |
