发明名称 METHOD AND DEVICE FOR CLEANING
摘要 PURPOSE:To securely scatter drops of water sticking on the surface of a body to be cleaned and eliminate a drying spot, and to obtain high cleanliness by setting the direction of grooves of the body to be cleaned which is mounted on a cleaning table not at right angles to the direction of centrifugal force by the high-speed rotation of the table. CONSTITUTION:The body 2 to be cleaned is mounted at the fitting part 3 of a jig 1 for cleaning and sucked through a vacuum sucking port 4. The body 2 to be cleaned has mountain-shaped grooves 2a and valley-shaped grooves 2b crossing them at right angles and the hair of a cleaning brush rotates in the same direction with the grooves 2b at a position (a) and with the grooves 2a at a position (b) by the rotation and forward-backward movement of the cleaning brush 11 by the injection of high-pressure water to the rotating jig 1, so dust in the grooves is removed completely together with the injected water. Then the jig 1 is rotated at a high speed, and consequently drops of cleaning water are scattered completely because the direction of the centrifugal force do not cross the directions of the grooves 2a and 2b at right angles. The drops of sticking water are securely removed in a short time to eliminate drying stops, thereby obtaining the high cleanliness.
申请公布号 JPS63231705(A) 申请公布日期 1988.09.27
申请号 JP19870063988 申请日期 1987.03.20
申请人 HITACHI LTD 发明人 FUJIKURA SEIJI;AKIBA ISAMU;HIYAMA MAKOTO
分类号 G11B5/127;H01L21/304 主分类号 G11B5/127
代理机构 代理人
主权项
地址