| 摘要 |
PURPOSE:To avoid the deterioration of gas laser medium circulation and the complexity of its structure and to enable preliminary ionization effectively by dividing at least one of cathode and anode which form main discharge electrode into a plurality of sections laterally to perpendicularly cross a longitudinal direction, and using at least one of a plurality of sections as preliminary ionization electrode used also as a main discharge electrode. CONSTITUTION:Charging energy charge in a main capacitor 4 is charged in each peaking capacitor 24 by the closure of a switch 5. Thus, discharge takes place concentratedly at a position near the opposed surfaces of cathodes 20 disposed near, between the divided two sections 23a, 23b laterally of electrode pieces 22a, 22b,..., of the cathode 20. Gas laser medium between the electrodes 20 and 21 is preliminarily ionized by ultraviolet light produced by the discharge. When the preliminary ionization is sufficiently advanced and a potential across the capacitor 24 exceeds the breakdown voltage of main discharge, the main discharge takes place between one section 23a of the electrode pieces 22a, 22b,..., of the cathode 20 and the anode 21, and a light output laser is stably oscillated. |
