| 摘要 |
PURPOSE:To stabilize an output by rapidly annihilating shock waves along the direction of separation of a main electrode by a shock absorber. CONSTITUTION:When a high voltage power 8 is operated, discharge is generated among upper/lower pin electrodes 5, 6, space between a cathode 3 and an anode 4 is pre-ionized by ultraviolet rays by the discharge, and main discharge is generated. Shock waves in the direction of the arrow (a) with the main discharge are annihilated in a short time, but shock waves in the direction (b) collide with the mutually opposed surfaces of the cathode 3 and the anode 4. Shocks are absorbed by the elastic deformation of a shock absorber 14 in shock waves colliding with a discharge member for the anode 4 in the shock waves. Accordingly, shock waves are quenched in a short time, thus preventing an unstable state from main discharge. |
