| 摘要 |
PURPOSE:To easily measure the intensity, etc., of a ray flux, etc., emitted by a ray source by providing a photodetection part and a through hole, an output part and a detection part, etc. CONSTITUTION:A monitor device 20 is set so that the center line of its through hole 14 is nearly aligned with a line which connects a semiconductor laser 7 to a vapor-deposited material 8; and its photodetection part 12 is directed to the laser 7. Further, an output part 16 is provided with photoelectric converting elements at individual optical fiber output terminals and electric signals are led out. Then particles vaporized from the vapor-deposited material 8 reach the resonator surface of the laser 7 through the through hole 14 of the device 20. In the process, the film is grown by vapor deposition to vary in film thickness, so variation of the light output of the laser 7 based on the variation is detected 21 to track and monitor the process. |
