| 摘要 |
PURPOSE:To save regulation of a multiplying factor due to an exchange and to improve maneuverability when the exchange is done between observation by a fluorescent plate and that by a display, by controlling an excitation current in a lens system so as to interlock with mounting/dismounting of the fluorescent plate so that a projection multiplying factor of an electron microscope image is automatically exchanged. CONSTITUTION:In order that an exchange is done between observation of an electron microscope image by a fluorescent plate 7 and that by a display 14, this equipment is provided with the following: a fluorescent plate driving device in which the fluorescent plate 7 is mounted on and dismounted from an optical axis of electron beams, and a means in which an excitation current in a lens system 6 is controlled interlocking with the mounting/dismounting of the fluorescent plate 7 so that a projection multiplying factor of the electron microscope image is automatically exchanged. When means are thus exchanged between the image observation by the fluorescent plate 7 and that by the display 14, the multiplying factor of the electron microscope image can be automatically exchanged into a desired image multiplying factor set-up in advance and so maneuverability can be produced.
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