| 摘要 |
PURPOSE:To easily realize a cylindrical target and to permit effective sputtering, by using split pieces having coupling edges in the direction oblique with the plane orthogonal with the axial center to assemble the target. CONSTITUTION:The target is so constituted that the entire part has a cylindrical shape by alternately laminating the annular split pieces 10a, 10b having the coupling edges 20 in the direction oblique with the plane orthogonal with the axial center of the target in a manner as to connect the coupling edges 20 to each other thereby assembling the target. The adjacent split pieces 10a, 10b are constituted by varying the component compsns. with each other. This target is disposed on a target supporting material 5 and spacers 21, 22 are disposed on the top and bottom end part sides which are then pressed and fixed. The easy assembly of the cylindrical target is thereby permitted even if materials having poor workability are used. Effective sputtering is thus permitted. |
