| 摘要 |
PURPOSE:To create ultra-high vacuum by providing a quartz glass member with a metallized layer formed on a sealed surface and a keep flange which keeps the quartz glass member through the fitting of the metallized layer on the metallic surface of opposed flange. CONSTITUTION:A quartz glass used as a window material 11 has almost no coloring properties with respect to a radiation (gamma-rays). However, because of its coefficient of thermal expansion which is significantly different from that of stainless steel, the application of vacuum sealing through direct engagement results in higher cost. To solve this problem, a metallized layer 12 is formed by applying a combined processing of evaporation and plating to a high-purity quartz glass which is a window material 11 having high radiation (gamma-ray)- resistant properties. After this, the surface of the metallized layer 12 is fitted under pressure with opposed flange 13 of stainless steel to enable vacuum sealing against an ultra-high vacuum. |
