| 摘要 |
PURPOSE:To manufacture raw materials for high-quality baked fine ceramics by charging metals, metallic compounds or ceramics in a confluent part of a plurality of DC plasma flows in a condition tightly sealed against atmosphere and heating and evaporating them. CONSTITUTION:A DC plasma gun 3 is arranged on a circumference, and a high-frequency plasma is provided beneath in such a manner that the center axis of the circumference may be aligned to the center axis of the high-frequency plasma. A plurality of DC plasma flows 1 are arranged so as to allow them to converge, and raw materials of metals, metallic compounds or ceramics are permitted to pass through the center of the confluence. Subsequently, the raw materials are shielded by a high-viscosity DC plasma flame 1, moving over the center axis to be supplied into the high-frequency plasma 2. In this method, the raw materials are always supplied into the high-frequency plasma 2 efficiently, even if reaction conditions vary slightly. Then these raw materials can be totally recovered in the form of powder with a diameter of 0.05-1.0mum. |
