| 摘要 |
PURPOSE:To closely stick a base plate on a cylindrical can and to stably produce a metallic thin film, by implanting electrons projected from an electron gun on the base plate which consists of high polymer material and runs along the circumferential surface of the cylindrical can from the direction opposite to the face formed with the metallic thin film on the base plate. CONSTITUTION:A base plate 1 consisting of high polymer material is run along the circumferential surface of a cylindrical can 4 and a metallic thin film is formed into a multilayer on the surface of the base plate 1 from an evaporation source 5 with a vacuum deposition method. Before the base plate 1 is introduced on the can 4, electron beams 9 are projected with an electron gun 8 from the side of the face opposite to the surface of the base plate 1 formed with the metallic thin film and electrons are implanted. In this case, the base plate 1 is run along a roll 3 preferably having same temp. as the can 4 or higher temp. and electrons are implanted on the roll 3. Thereby the base plate 1 is closely stuck on the can 4 by generating electrostatic attraction on the surface of the base plate 1 and the temp. of the base plate 1 is uniformly controlled by the can 4 and a metallic thin film is stably formed in a range over long size.
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