| 摘要 |
PURPOSE:To easily manufacture a superconducting material having high critical magnetic field and excellent in long-term stability, by alternately laminating a thin film of a specific thickness composed of a soft metal having superconductivity and a thin film of semiconductor or electric insulator. CONSTITUTION:A thin film of <=500nm, preferably, <=about 50nm, thickness composed of a soft metal with superconductivity, such as lead, lead alloy, indium, etc., and a thin film of <=about 1,000nm thickness of semiconductor such as silicon, etc., and/or electric insulator such as silicon dioxide, etc., are alternately laminated. This laminated structure can be formed by cooling a substrate of glass, etc., down to <=about 0 deg.C and properly forming thin films by using a film-forming method, e.g., a sputtering method, a CVD method, etc. Moreover, it is desirable to regulate the number of laminations, e.g., in the case of the combination of lead and silicon to >=about 10. By the above-mentioned constitution, the breaking of wire due to the air oxidation of the thin soft-metal films is prevented and also superior long-term stability is provided. Further, the value of the critical magnetic field can be improved by forming the thin films into laminated structure.
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