发明名称 EVALUATION OF RADIATION RESISTANCE OF INTEGRATED CIRCUIT
摘要 PURPOSE:To predict the radiation resistance of an IC, in which there is no experimental data, by predicting the radiation resistance of an integrated circuit, a manufacturing process and the degrees of integration of which are known, by using the relationship of the degrees of integration at every manufacturing process and radiation resistance. CONSTITUTION:The device consists of a CRT 1 displaying the result of the prediction of the radiation resistance of an IC, a keyboard 2 for inputting data, a memory 5 previously storing a control program for the device, a CPU 4 controlling the device according to the program, a disk 6 for storing the radiation-resistant data of the IC and a bus 3 connecting these parts. The ICs are sorted by manufacturing processes, and the relationship of the radiation resistance of the ICs and the degrees of integration of the ICs in a sorted IC group is acquired previously from the radiation-resistant data of a small number of the ICs. The radiation resistance of the ICs having unknown radiation-resistant data is predicted by using beforehand obtained said relationship, employing the manufacturing processes and degrees of integration of the ICs as data. Accordingly, radiation resistance can be predicted when manufacturing processes and the degrees of integration are determined regarding even the ICs in which there is no expenrimental data of radiation resistance.
申请公布号 JPS63220536(A) 申请公布日期 1988.09.13
申请号 JP19870052862 申请日期 1987.03.10
申请人 AGENCY OF IND SCIENCE & TECHNOL 发明人 KAMIMURA HIROSHI
分类号 H01L21/66;G01R31/26;G01R31/30 主分类号 H01L21/66
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