| 摘要 |
PURPOSE:To shorten a laser oscillation starting time and also to prevent contamination after oscillation stop by a method wherein a pair of opening and closing plates are provided at both ends of a discharge tube, which shut the connection of the discharge tube inner part with a pair of connected bodies provided at both ends of the discharge tube. CONSTITUTION:Opening and closing plates 20a and 20b are provided at flange sections of connected cylinders 9 and 10 so as to shut the connection of an inner cylinder 1 inner part with inner parts of the connected cylinder 9 and 10. The opening and closing plates 20a and 20b are made of ceramic or the like equivalent to material of the inner cylinder 1. In starting laser oscillation in this structure, decompression is performed through an exhaust equipment 16 after a few metal lumps 18 are placed in the inner cylinder 1, the inner cylinder 1 is shut at both ends with the opening and closing plates 20a and 20b after gas is supplied through a gas supply equipment 15, and then discharge is started so as to vaporize the metal lumps 18. After vaporization, the opening and closing plates 20a and 20b being open, laser oscillation is started. And, after a laser oscillation stops, the opening and closing plates 20a and 20b are shut. By these processes, a laser oscillation starting time is shortened, and contamination is prevented, which is caused by residual metal vapor after a laser oscillation stops. |
