| 摘要 |
PURPOSE:To increase an output, and to improve efficiency by dividing a creeping discharge region, mounting a plurality of creeping discharge electrodes and uniformly pre-ionizing a wider region. CONSTITUTION:A creeping discharge electrode 3 is set up at the central section of an insulator 2 in the direction rectangular to beams, and creeping discharge electrodes 4, 4' are fitted at both end sections of the insulator 2. Creeping discharge is each generated between two main electrodes 1 oppositely positioned into a laser gas and among the creeping discharge electrodes 3 and 4 and 4' through the insulator 2, and main discharge is conducted between plasma shaped to the insulator 2 and the creeping discharge. According to such constitution, each creeping discharge is equalized, and main discharge is made uniform. Consequently, efficiency is improved with a large output. |
