| 摘要 |
PURPOSE:To effectively prevent occurrences of bubbles in welded glass by applying dry etching to the butting surface on which glass is welded of a ferrite piece before the butting of it. CONSTITUTION:In the upper surface of a ferrite piece 6 that will be a butting surface, track grooves 2 are formed with prescribed intervals in between. A magnetic thin metal film 3 of a high saturation magnetic flux density is formed by sputtering on the entire surface of the track grooves 2 in the piece 6, and on the thin film 3, a protection film of Cr is formed. The said thin film 3 is coated with the welded glass 5, then the butting surface of the piece 6 is ground to expose the thin film 3. Thereafter, window 4 for the windings and glass grooves 7, 8 are provided in one of the pair of pieces 6, further, the butting surface of the piece 6 is dry-etched, on top of which is a thin film as gap spacer formed. Then, both pieces 6, 6 are made abutting on each other, and a glass rod 9 is inserted in the glass grooves 7, 8 of one of the pieces 6, 6 and a second welding is executed with said glass rod 9 and the welded glass. Thus a block 10 is produced by connecting the pieces 6, 6. The surface 11 of the block 10 is machined and ground, then the block 10 is cut into pieces at cutting lines 12 in azimuth angle.
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