| 摘要 |
PURPOSE:To simplify the structure of orientation flat and lower the cost by rotatably holding wafer and inclining the held wafer. CONSTITUTION:A roller 11 is rotatably provided corresponding the diameter of wafer 20 and along the external circumference thereof in the housing 10. At the roller 11, a collar 12 is provided in the same level. At the one end of housing 10, a rod 13 of elevator is rotatably provided. The wafer 20 having an orientation flat 21 is carried into the housing 10 and is held rotatably by the roller 11 and coller 12. Thereafter, the one end of housing 10 is lifted for the specified distance, the wafer 20 in the eccentric gravity is naturally rotated and stops, thus completing the positioning of orientation flat 21. Thereafter, this wafer 20 is carried to the outside of housing 10 and respectively delivered in accordance with application destination. |
