| 摘要 |
PURPOSE:To obtain an ultrasonic probe having the small mutual interference (crosstalk) of vibration between respective arrayed elements by forming notched grooves on the whole part of an ultrasonic wave transmitting/receiving piezo-electric plate or a part of an acoustic matching layer and forming the whole as a bent shape so that the ultrasonic wave transmitting/receiving side shows a recessed face. CONSTITUTION:A constitution body consisting of a PZT piezo-electric ceramic plate 41, a flexible base 42, an earth side electrode plate 43, and composite resin 46 is mounted on a glass board 47 so that the flexible base 42 side is turned upward and fixed with wax. The constitution body is used as a work and notched grooves 48 having the prescribed width and depth are diced only by a prescribed pitch and the prescribed number of grooves by using a dicing saw. The constitution body removed from the glass board 47 is mounted on the upper surface of a bending mold 49 so that the composite resin 46 side to be an acoustic matching layer is turned downward to form a bent array ultrasonic probe. Since the notched grooves 48 form spatial parts, crosstalk can be reduced. |
