| 摘要 |
PURPOSE:To enable easily correcting the gap between the center of a quartz boat and the quartz tube in a heat treatment furnace by driving a supporter which supports a quartz rod which pushes the quartz boat in the direction of inserting the quartz boat and in a perpendicular direction. CONSTITUTION:If a gap exceeding a tolerance occurs when a quartz boat 3 is inserted in a quartz tube 6, the gap is detected by screening the transmitted light of transmission type sensors 2a-2h by a semiconductor wafer 8. When the gap is detected, a quartz rod supporter 5 is moved in the direction in which the gap is made, the tip of the quartz boat 8 is moved to the opposite direction of the quartz rod supporter 5 and the gap is corrected. When the gap is corrected and the light of projectors 2a-2h arrives at the light receivers 2a'-2h' of the transmission type sensors, a correction operation is finished and the quartz rod supporter 5 is moved to the middle point between an original position and a corrected position by a quartz rod supporter drive unit 1. During the correction operation, the insertion of the quartz boat 3 is continued, but if the gap of the quartz boat 3 is not corrected and the other transmission type sensors detect the gap, the quartz boat 3 is drawn out after stop. |
