发明名称 LASER BEAM TRIMMING DEVICE
摘要 PURPOSE:To prevent a part except a desired trimming part from being damaged by not changing the relative position between a condensing point of a laser beam and an object to be trimmed while the laser beam is projected and projecting the laser beam for the time controlled by a projection time control means to perform the trimming. CONSTITUTION:The laser beam from a laser beam generator 1 is condensed on the object 11 to be trimmed by a laser beam condensing means 2. The projection time control means 3 controls the projection time of the laser beam and a trimming control means 5 controls the projection time control means 3 and a mounting stand 4. The mounting stand 4 is moved up to the positioning starting point by the trimming control means 5 to finish the positioning. Next, the laser beam is made in a projecting state by the projection time control means 3 and when the given time is attained, the projection is stopped. The trimming control means receives the projection finishing to finish the first laser beam projection. In this way, the trimming can be performed without damaging the part except the desired trimming part.
申请公布号 JPS63212079(A) 申请公布日期 1988.09.05
申请号 JP19870045534 申请日期 1987.02.27
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NODA HITOSHI;TAKAHARA HIROSHI;TAMURA TATSUHIKO
分类号 B23K26/00;G03F1/00;G03F1/72;H01L21/027;H01L21/30 主分类号 B23K26/00
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