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发明名称
BOOTANORDNUNG ZUM HALTEN VON HALBLEITERSCHEIBEN
摘要
申请公布号
DE3805293(A1)
申请公布日期
1988.09.01
申请号
DE19883805293
申请日期
1988.02.19
申请人
ASM INC
发明人
GARDNER, STEVEN J., SCOTTSDALE, ARIZ., US
分类号
H01L21/285;C23C14/50;C23C16/44;C23C16/50;C23C16/505;C23F4/00;H01J37/32;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;H01L21/67;H01L21/673;(IPC1-7):H01L21/68;C30B25/12;C30B33/00
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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