| 发明名称 |
Conveyor device for alignment |
| 摘要 |
A conveyor device for alignment in which minutely displaceable members and hydraulic fluid supply pads are disposed between a slide and a guide. The relative position of the slide and the guide is adjusted by controlling the dimension of the minutely displaceable members.
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| 申请公布号 |
US4768064(A) |
申请公布日期 |
1988.08.30 |
| 申请号 |
US19870139114 |
申请日期 |
1987.12.28 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
ISOHATA, JUNJI;NAKASUGI, MIKIO;YOKOMATSU, TAKAO |
| 分类号 |
H01L21/30;G03F7/20;G03F9/00;G05D3/00;G12B5/00;H01L21/027;H01L21/67;H01L21/68;(IPC1-7):G03B27/42 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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