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发明名称
Verfahren zum Aufsockeln und zum Bearbeiten von aufgesockelten Halbleiteranordnungen
摘要
申请公布号
DE1489014(A1)
申请公布日期
1969.06.26
申请号
DE1964J025643
申请日期
1964.04.11
申请人
DEUTSCHE ITT INDUSTRIEGESELLSCHAFT MBH
发明人
HORST KNAU,DR.DIPL.-PHYS.
分类号
H01L21/48
主分类号
H01L21/48
代理机构
代理人
主权项
地址
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