| 摘要 |
PURPOSE:To eliminate distortion in waveform of an output signal by providing a substrate formed by using ZrO2, main coil formed by using Nb3Ge and underlying electrode for a tunnel type Josephson junction. CONSTITUTION:The main coil 3 formed by using Nb3Ge and a terminal part 13 are formed on the surface of the substrate 21 formed by using ZrO2. After a parallel resistor 6 consisting of Pd is formed therebetween, an insulating layer 22 consisting of SiO2 is formed across the resistor 6 and terminal part 13 except the part of the lower electrode 12 formed to project atop the coil 3. After an input coil 2 formed by using Nb is formed on the coil 3, an insulating layer 24 consisting of SiO2 is further formed except the junction of a contact wiring 15 and the part of a tunnel barrier 23 on the electrode 12 and thereafter, a counter electrode 25 consisting of a Pb alloy is formed across the tunnel barrier 23 and the terminal part 13 so that the tunnel type Josephson junction is constituted of the electrode 12, the tunnel barrier 23 and the electrode 25. The distortion in the waveform of the output signal is thereby eliminated.
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