| 摘要 |
PURPOSE:To prevent the substrate to be treated from oxidization when it is carried into or out from a furnace core tube by a method wherein a basket, which can be formed integrally by engaging pawl of the lower basket retaining the substrate to be treated to the engaging pawl of the upper basket, is provided and a nitrogen introducing hole is provided and nitrogen gas is introduced into the basket. CONSTITUTION:The engaging pawl 2a of the lower basket 2 is engaged to the engaging pawl 1a of the upper basket 1, the substrate to be treated 5 is placed on the lower basket 2 of the integrated basket, and the basket is brought into a nitrogen atmosphere by introducing nitrogen from a nitrogen introducing hole 1c. In the state wherein the nitrogen in positive pressure is started to leak from the gas of the upper basket 1 and the lower basket 2, the integrated baskets are inserted into the furnace core tube 3 which is heated up by a heater which is not shown in the diagram. As a result, the substrate 5 to be treated is prevented from oxidization.
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