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摘要
申请公布号
JPS63127973(U)
申请公布日期
1988.08.22
申请号
JP19870018920U
申请日期
1987.02.12
申请人
发明人
分类号
C23C14/06;C23C14/22;C23C28/00;(IPC1-7):C23C14/06
主分类号
C23C14/06
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