| 摘要 |
<p>PURPOSE:To improve measurement accuracy by using a pair of a heating resistance and a resistance bulb, mounting a thermal type flow sensor which detects the rate, velocity, and direction of a flow on a circular plate and forming a level plane, and straightening the flow of air. CONSTITUTION:The thermal type flow sensor chip 1 which consists of the pair of the heating resistance and resistance bulb or a pair of a transistor (TR) for heat generation and a TR for temperature measurement and detects the rate, velocity, and direction of the flow is mounted on the circular plate 2. The top surface of the chip 1 and the top surface of the circular plate 2 are flattened in level with each other. A chip insertion opening is formed in the circular plate 2 according to the shape of the chip 1 and a lead wire 3 is led out from the reverse surface. Consequently, flaws of air in areas I and II are straightened to improve the measurement accuracy.</p> |
