| 摘要 |
PURPOSE:To make effective use of the moving time of a spectroscope and to enhance analysis efficiency by making the measurement in an analysis mode in which the spectroscope is not used during the period when the spectroscope moves from a certain measuring wavelength to another measuring wavelength. CONSTITUTION:An EPMA which is a charge beam analyzer is provided with an input part 1 such as keyboard, a wavelength setting means 2 which sets the measuring wavelength according to the analysis mode, etc., inputted thereto, an analysis mode control means 3 which controls the sequence of the measurement operations according to the analysis mode, an X-ray signal control part 4 which controls the spectroscope, etc., an electron ray control part 5 and an analyzer body 6. The analysis mode control means 3 controls the respective parts in such a manner that the measurement (e.g., surface observation) in the analysis mode of not using the spectroscope is executed during the period when the spectroscope moves from the certain measuring wavelength (e.g., peak wavelength of Kalpha line of a certain element) to another measuring wavelength (e.g., background wavelength of the Kalpha line). Then, the time which is heretofore waiting time is effectively utilized.
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